Abstract
Monolayer MoNx and nano-multilayer CrN/Mo2N coatings were prepared by arc ion plating and characterized by X-ray diffractometry (XRD), transmission electron microscopy (TEM), friction tester and hardness tester. The results from TEM and XRD analysis showed that the crystal structure of MoNx and CrN/Mo2N coatings has a cubic lattice structure. The microhardness of MoNx coatings deposited at lower N2 pressure is about 2100 HV which is higher than 1950 HV of the coatings deposited at higher N2 pressure. The variation of friction coefficient of MoNx coatings influenced by N2 pressure is obvious at higher N2 pressure. The modulation period of CrN/Mo2N coatings is from 58.5 nm to 11.17 nm with increasing substrate rotation speed (Srs) in the range of 1–5 rpm. The maximum hardness of CrN/Mo2N nanomultilayer coatings, when the Srs is 7 rpm, is approximately 2950 HV. The value is 1.5 times higher than those of the MoNx monolayer coating (2000 HV). These enhancement effects in superlattice films could be attributed to the resistance to dislocation glide across interface between the MoN and CrN layers. The value of average friction coefficient of CrN/Mo2N nanomultilayer coatings is about 0.33 which is higher than 0.3 of MoNx coatings and lower than 0.6 of CrN. The wear rate of CrN/Mo2N nanomultilayer coatings is about 7 × 10−7 mm3/N·m which is obviously lower than 3.3 × 10−6 mm3/N·m of CrN coatings and higher than 1.2 × 10−7 mm3/N·m of MoNx coatings.
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