Abstract
Gold thin films were deposited on the substrate of silicon and fused silica by method of Vacuum Gas Jet Deposition. Obtained films were coated with a fluoropolymer and annealed in a rarefied inert gas atmosphere at the temperature of 400 °C. The film morphology and composite were studied by the scanning electron microscopy. Optical properties of obtained coatings and composites were investigated. The influence of the fluoropolymer coating on formation of gold nanoparticles in the result of annealing of its thin films is established. The critical gold film thickness coated with fluoropolymer is determined, below which the presence of fluoropolymer lends to the formation of spherical nanoparticles during annealing of the composite in a studied range of parameters.
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