Synthesis of βGa2O3 nanowires by an MOCVD approach

Abstract

We have synthesized monoclinic gallium oxide (βGa2O3) nanowires on Au-coated Si substrates by a reaction of a trimethylgallium and oxygen mixture. The βGa2O3 nanowires became progressively thinner from bottom to top, with diameters ranging from 10 to 200 nm and lengths of several micrometers. We found that Au-containing nanoparticles were attached to the tips of the βGa2O3 nanowires and thus the nanowire growth could be a vapor–liquid–solid process .