Synthesis of β-Ga2O3 nanorods by catalyzed chemical vapor deposition and their characterization

Abstract

β-Ga2O3 nanorods have been synthesized by chemical vapor deposition using CaF2 as dispersant and Ni2+ ions as catalyst. The composition, crystal structure, morphology, and optical property were characterized. X-ray diffraction data indicate the product to be high purity β-Ga2O3. The nanorods are 40–100 nm in diameter and about several microns in length and present a core–shell structure. A broad and strong emission band ranging from 300 to 650 nm exists with four Gaussian bands centered at 357 (UV), 420 (blue), 475 (dark blue), and 529 nm (green). Growth of β-Ga2O3 nanorods agrees with the vapor–solid growth mechanism.