Synthesis of Crack-Free PZT thin Films by Sol-gel Processing on Glass Substrate

Abstract

PZT thin films deposited on glass substrates have been proposed for many applications such as adjustable optics in future X-ray telescopes. Sol-gel method is widely utilized to prepare PZT thin films due to its low reaction temperature, uniform mixing of reactants, and precise control of component. Crack-free transparent PZT thin films were prepared by dip-coating the solutions of complex alkoxides. PZT thin films were calcined at various temperatures and characterized by X-ray diffraction, field emission scanning electron microscopy to examine the surface morphology, and FT-IR spectroscopy. The XRD analysis confirmed the formation of perovskite phase at 600°C. FE-SEM results showed nucleation of PZT perovskite phase. Furthermore, the average grain size was measured in the range of 55 to 190nm.