Synthesis of Core‐Shell SiOx/Carbon Nanofibers on Silicon Substrates by Ultrasonic Spray Pyrolysis

Abstract

We synthesized the core‐shell SiOx/carbon nanofibers with diameters of 200–300 nm using ultrasonic spray pyrolysis with a phosphorus/ethanol mixture. High‐resolution transmission electron microscopy (HRTEM) and energy‐dispersive spectroscopy (EDS) investigations confirmed the core‐shell structure, which consisted of a core of SiOx and a shell of amorphous carbon. The phosphorus atoms corroded the entire silicon substrate surface, and the Si‐P liquid‐catalyzed the solid‐liquid‐solid mechanism is proposed to explain the growth of the core‐shell SiOx/carbon nanofibers.