Abstract
In this work, the deposition of carbon nanowalls (CNWs) by inductively coupled plasma enhanced chemical vapor deposition (ICP-PECVD) is investigated. The CNWs are electrically conducting and show a large specific surface area, which is a key characteristic to make them interesting for sensors, catalytic applications or energy-storage systems. It was recently discovered that CNW films can be deposited by the use of the single-source metal-organic precursor aluminium acetylacetonate. This precursor is relatively unknown in combination with the ICP-PECVD deposition method in literature and, thus, based on our previous publication is further investigated in this work to better understand the influence of the various deposition parameters on the growth. Silicon, stainless steel, nickel and copper are used as substrate materials. The CNWs deposited are characterized by scanning electron microscopy (SEM), Raman spectroscopy and Auger electron spectroscopy (AES). The combination of bias voltage, the temperature of the substrate and the substrate material had a strong influence on the morphology of the graphitic carbon nanowall structures. With regard to these results, a first growth model for the deposition of CNWs by ICP-PECVD and aluminium acetylacetonate is proposed. This model explains the formation of four different morphologies (nanorods as well as thorny, straight and curled CNWs) by taking the surface diffusion into account. The surface diffusion depends on the particle energies and the substrate material and thus explains the influence of these parameters.
Highlights
The first report of the synthesis of carbon nanowalls (CNWs), i.e., wall-like carbon nanosheets aligned perpendicular to the substrate, was given by Wu and co-workers [1]
The CNWs deposited are characterized by scanning electron microscopy (SEM), Raman spectroscopy and Auger electron spectroscopy (AES)
We investigated the influence of the substrate material, the substrate bias and the substrate temperature on the deposition process and on the structure of the synthesized CNWs
Summary
The first report of the synthesis of carbon nanowalls (CNWs), i.e., wall-like carbon nanosheets aligned perpendicular to the substrate, was given by Wu and co-workers [1]. While all of the above mentioned structures are found on stainless steel and aluminium ( shifted to different bias voltage and temperature values), on nickel and silicon no nanorods growth zones could be identified and only straight and curled CNWs were found.
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