Synthesis of boron/nitrogen-incorporated diamond-like carbon films by pulsed laser deposition using nitrogen gas and a boron-containing graphite target

Abstract

We have deposited boron/nitrogen-incorporated diamond-like carbon (B–N-DLC) films by pulsed laser deposition (PLD) using N2 gas and a B-containing graphite target, and compared the mechanical, tribological, electrical, and surface properties of the B–N-DLC films with those of pure DLC, boron-incorporated DLC (B-DLC), and nitrogen-incorporated DLC (N-DLC) films prepared by PLD. The B-DLC film had a much higher critical load than the pure DLC. The critical load of the B–N-DLC films became maximum at an optimum N2 pressure, which was higher than those of the pure DLC, B-DLC, and N-DLC films. The friction property in air was degraded by the N incorporation, whereas the B incorporation did not have a significant effect on the friction coefficient. The B–N-DLC films deposited at higher N2 pressures exhibited superhydrophilic wetting properties. The B–N-DLC films prepared at moderate N2 pressures had resistivities much less than that of the pure DLC film.