Synthesis of amorphous ZrCu alloys by magnetron co-sputtering

Abstract

In the last few years amorphous metal alloys were under intensive research because of their specific properties. We studied Zr x Cu 1 − x amorphous films co-condensed by magnetron sputtering in relatively high vacuum, so thermalization of transported particles would not have taken place, i.e. the substrate is reached by enhanced energy particles (10–30 eV). X-ray diffraction methods were applied for studying a glass forming range vs. substrate temperature in films of Zr x Cu 1- x deposited on different temperature substrates (100 °C, 200 °C, 300 °C, 400 °C, 470 °C). The dependences of electrical conductance, light reflectance and spectral properties of reflection in the same composition Zr x Cu 1 − x coatings from a coating phase were studied. From the results of the current work it can be concluded that using simultaneous Zr and Cu magnetron deposition in a relatively high vacuum amorphous Zr x Cu 1 − x coatings can be obtained in a wide composition and substrate temperature range.