Abstract
Amorphous silicon–germanium alloys with 70% Si and 30% Ge have been formed by rapid heating in a pure E-field in a single mode 2.45 GHz microwave cavity. The synthesis of amorphous Si–Ge alloy by all conventional processing is difficult. This polarized microwave process provides another striking example of its unique abilities: producing bulk amorphous Si–Ge alloys. The microwave fabricated amorphous Si0.7Ge0.3 alloy composition exhibited relatively high Seebeck coefficient with high potential of its application in high efficient thermoelectric materials.
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