Abstract
This work reports the synthesis, micro-structural characterization and optical properties of lithium niobate (LiNbO3) thin films deposited by aerosol assisted chemical vapor deposition (AACVD) on silicon substrates. The films deposited were polycrystalline, uniform, dense, non-light scattering and firmly adhered to the substrate. This was deduced from high resolution electron microscopy studies and spectral reflectance measurements. The films were not epitaxial; however, they are considered smooth enough to be employed in optical waveguide applications, since their roughness is very low compared to the wavelength of the utilizable radiation.
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