Abstract
A new environmentally friendly photoacid generator (PAG) consisting of diphenyliodonium salt as photoactive cation and fluoroalkyl sulfonium anion as counter ion was synthesized. From FT-IR measurement, it was found that non perfluorooctyl sulfonates (PFOS) PAG from UV irradiation could produce strong acid that subsequently catalyzes the deblocking of a protecting group in copolymer. A positive resist formulation at 248 nm based on the chemically amplified resist mechanism indicated that fluoroalkyl sulfonium anion was capable of providing good image profiles.
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