Synthesis and Study of Modified Nanostructure Porous Silicon Layers for Chemical Gas Sensing

Abstract

In this work, We prepared a modified nanostructure porous silicon (PS) layers for effective chemical gas sensing. Nanopore covered microporous silicon gas sensor has been fabricated using electrochemical etching in an HF acid and ethanol solution. A porous silicon (PS) surface has been modified using selective depositions formed from metal to enhance the response to Sensing of CO2. (PS) has been interest for gas sensing because of the exceptional gathering of importent features. By setting the process parameters,the porosity, pore size, and the morphology can be modifid and practically controlled. The modified porous silicon layers were characterized using different techniques such as scanning electron microscopy(SEM)and a series of electrical characterizations to study the structures in the contact of the carbon dioxide was achieved.