Synthesis and Sensor Characteristics of Nanoscale Thin Films in the In2O3–SnO2 and Y2O3–TbOx(CeOx) Systems

Abstract

(In2O3)0.95(SnO2)0.05, (TbOх)0.50(Y2O3)0.50, and (CeO2)0.80(Y2O3)0.20 single-phase cubic solid solution xerogels and nanocrystalline powders have been synthesized via coprecipitation of hydroxides. Using these powders as precursors, nanoscale film electroconductive materials on a corundum substrate have been produced by screen printing. The highest speed of sensor response to ozone is attributed to In0.95Sn0.05O1.5 films, reaching 8–10 s at a temperature of 473 K. (TbOх)0.50(Y2O3)0.50 thin film is found to be sensitive to changes in the concentrations of (CO + CO2) (the sensitivity coefficient S = 25.11) and ozone (S = 3.16–7.94). (CeO2)0.80(Y2O3)0.20 film exhibits a sensor response to (CO + CO2) (S = 3.10). This study opens up the prospects of using the obtained nanopowders and relevant thin films as materials for resistive gas sensors operating at oxygen pressures of 103–104 Pa.