Synthesis and Imaging Performances of A New Type PAC.

Abstract

In this paper, a new type photoactive compounds (PAC) of diazidonaphthoquinone(DNQ) have been synthesized based on the ballast of 2, 2-diphenyl-2-phenols group acetic lectone compound which is synthesized from benzilic acid.The new type PACs have good miscibility with common novolacs and dissolubility in the solvents used in positive photoresists and photosensitive compositions for PS plates. The photosensitive compositions composed of each new PAC and the novolac have well film-forming performance. Before exposure, the formed photosensitive film behaves strong dissolution inhibiting effect in alkaline developer. After exposure it becomes very easy to dissolve in developer. In other words it obtains good dissolution accelerating performance in exposed areas. Because the change of the effect of dissolution inhibition and dissolution acceleration is remarkable, B/P value can be designed higher, the photosensitivity is also higher and the quantity of exposure energy required for imaging is about 200mJ/cm2. In addition, it has good contrast and imaging film is easy to be taken off in concentrated alkaline liquor.The PACs are widely used in photoresists for integrated circuit(IC), especially in photoresists for liquid crystal display(LCD) and photosensitive compositions for positive PS plates including heat-sensitive computer-to-plate(CTP) plates.