Abstract
Pb(Zr0.52Ti0.48)O3 thick films embedded with ZnO nanoneedles (PZT–ZnOn) were successfully prepared on Pt/Cr/SiO2/Si substrates by the hybrid sol–gel method via spin-coating ZnOn suspension and lead zirconate titanate (PZT) sol. To control the orientation of the films, a PbTiO3 (PT) layer was first deposited as a seed layer. Effects of annealing method and ZnOn contents on the corresponding orientation and crystallization of PZT–ZnOn films were investigated by XRD and SEM. The results show that all the PZT–ZnOn composite thick films have pure perovskite structure and high-quality film surface. The dielectric and ferroelectric properties of the PZT–ZnOn films are close to the PZT films, and have a little decrease with the increasing of the ZnOn contents.
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