Abstract
AbstractWater soluble aromatic diazonium double salts, p‐diazodiphenylamine chloride zinc chloride (DZS‐1) and p‐diazoanisol chloride zinc chloride (DZS‐2), have been evaluated as photobleachable dyes for contrast enhancement lithography. After testing the bleaching characteristics, aqueous solutions of DZS‐1 and poly(vinyl alcohol) were used as a contrast enhancement material. Thermal stability, resist contrast, exposure parameters and other bleaching characteristics of the photobleachable membranes were investigated. A. commercial i‐line photoresist was used to evaluate the contrast ratio of the DZS‐1/PVA CEL layer. The contrast ratio obtained in this investigation is 1.67.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
