Abstract
Volatile molybdenum precursors in liquid phase for vapor phase deposition of thin films containing molybdenum have been successfully synthesized. Heteroleptic liquid molybdenum precursors were prepared by treating MoCl5 with bidentate β-ketonate ligands such as 2,2,6,6-Tetramethyl-3,5-heptanedione (thdH) at different stoichiometric ratios (1:1 and 1:2). Molybdenum precursors in liquid phases also have been obtained via simple ligand-exchange reactions of Mo(thd)xCl4-x (x = 1 or 2) with LiNR2 (R = Et(C2H5), iPr(C3H7), SiMe3(Si(CH3)3)). The newly synthesized molybdenum precursors are readily miscible (soluble) in most organic solvents, such as acetonitrile, diethyl ether, and hexane. The chemical composition of these precursors has been characterized using Fourier-transform infrared analysis and nuclear magnetic resonance spectroscopy. The volatility and thermal stability of precursor compounds have also been investigated using thermogravimetric analysis and vapor pressure measurement. The strategy used in this experiment, which introduces bidentate ligands to the coordination sphere of the central molybdenum atom in MoCl5, improves the volatility and transferability of molybdenum precursors in gas-phase deposition processes by making them in a liquid phase.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
