Abstract
Due to a nanolaminate structure, MAX phases are materials with an interesting set of properties. The present paper is focussed on the synthesis and characterization of Ti2AlC and Ti2AlN MAX phase coatings. They were deposited by dc magnetron sputtering from single elemental Ti, Al, and C targets (Ti-Al-C system); in addition to Ti and Al, nitrogen was used for the Ti-Al-N system. XRD analysis revealed the growth of cubic Ti3AlC and Ti3AlN perovskite phases in the coatings deposited at 540°C. After coating deposition an annealing treatment at 800, 1000 and 1200°C was carried out. The results indicate that annealing for 1 h in vacuum at 800°C enhances crystallization of the Ti2AlN and Ti2AlC MAX phases. It was also observed that annealing at temperatures higher than 1000°C enhances the decomposition of both phases, Ti2AlC and Ti2AlN, and gives rise to the formation of the carbide and nitride phases TiCx and TiNx, respectively.
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