Synthesis and characterization of the aligned hydrogenated amorphous carbon nanotubes by electron cyclotron resonance excitation

Abstract

Aligned hydrogenated amorphous carbon nanotubes on porous anodic alumina have been synthesized by electron cyclotron resonance chemical vapor deposition (ECR-CVD) using the precursor gases, acetylene and argon. The composite film, with the aligned hydrogenated amorphous carbon nanotubes embedded in the porous anodic alumina, was found to be robust and is expected to have potential application in optic, electronic and optoelectronic devices. It is possible to prepare a large area of such a film by taking advantages of the ECR-CVD process, e.g. high plasma density at low temperature, less ionic damage, contamination-free and high deposition rate. By adjusting the pore size of anodic alumina, hydrogenated amorphous carbon nanotubes of various diameters can be produced in a range from 230 down to 30 nm. Characterization of the nanotubes in anodic alumina was carried out by field emission scanning electron microscopy (FESEM), Fourier transform infrared spectroscopy (FTIR), transmission electronic microscopy (TEM) and electron energy loss spectroscopy (EELS). The results indicate that the nanotubes consist of amorphous hydrogenated carbon, which are grown at a temperature of ∼100°C for 4 min.