Abstract

Brookite titanium dioxide (b-TiO2) films were successfully deposited on Y-stabilized ZrO2 (110) substrates at different substrate temperatures (500–650°C) by the metal organic chemical vapor deposition technique. The results of X-ray diffraction θ-2θ scan indicated that the b-TiO2 film deposited at 550°C had the best single crystalline quality, for which the heteroepitaxial relationship and the microstructure were identified by the X-ray diffraction Φ scan and high resolution transmission electron microscopy measurements. A schematic diagram was proposed to clarify the epitaxial growth mechanism. The composition, morphology and optical properties of the b-TiO2 films have been investigated in detail.

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