Abstract
High pure Sm(DPM) 3 (DPM=2,2,6,6-tetramethyl-3,5-heptanedionato) powder was successfully synthesized from Sm(NO 3) 3 and HDPM in ethanol/aqueous solution followed by reduced pressure distillation and recrystallization from toluene. This metal β-diketonate complex used as precursor for metal-organic chemical vapor deposition (MOCVD) of Sm 2O 3 film has been characterized by elemental analyses, 1H-NMR spectroscopy, thermogravimetry-differential thermal analysis (TG-DTA analysis), infrared spectroscopy and mass spectroscopic analysis. The thermal decomposition behavior of the complex is sensitive to the ambient gases and Sm(DPM) 3 is sufficiently stable after it being exposed to air for 30 days. The chemical bonds in the complex are decomposed in the sequence of C–O>SmO>C–C(CH 3) 3>C–C and C–H at elevated temperatures. At 400°C this complex thoroughly converts into Sm 2O 3 and Sm 2(CO 3) 3 in air. The decomposition mechanism may be somewhat different at different operation conditions.
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