Synthesis and characterization of pure and Cu-doped WO3 thin films for high performance of toxic gas sensing applications

Abstract

Oxygen vacancies and the high surface area of nanostructured materials offers stronger gas adsorption active sites for improved gas sensing performance. In the present work, we have deposited WO3-based thin films using a chemical spray pyrolysis technique at a substrate temperature of 400 °C with other optimized preparation parameters. Besides, this study reports the influence of Cu doping at various weight percentages on the structural, morphological, optical and toxic gas sensing properties of WO3 films in detail. The crystalline structure of the material was investigated using the X-ray diffraction technique. Each X-ray diffraction analysis of the films demonstrated a polycrystalline nature, matching the hexagonal phase of WO3 with the (200) plane of preferential orientation of crystal growth. The optical characteristics of the thin film's material were analyzed by UV–Vis absorption spectroscopy. The optical energy bandgap (Eg) of the deposited thin films was estimated using the Tauc relation, and the value was decreased along with the increase in the Cu-doping concentration. The surface roughness of the films has been investigated using atomic force microscopy. The TEM patterns of sprayed Cu-doped WO3 thin films exhibit nanocrystalline features. Detecting toxic gasses is of great importance across the globe due to an alarming enhancement in respiratory, ocular, skin, and lung diseases. Hence, cost-effective and room temperature-operated Cu-doped WO3 thin film sensors to trace low concentrations of toxic gasses have been investigated and systematically reported. It is observed that the sensor response is to be increased with the increase in Cu-doping concentration, particularly the 4 wt.% Cu-doped sensor exhibited a response value of 7.2 and fast response and recovery times in the presence of 50 ppm ammonia vapor.