Abstract
A new family of positive photosensitive polyimide systems composed of solvent soluble polyimides and diazonaphthoquinone compounds(DNQ) has been prepared. Solvent soluble polyimides were synthesized by reacting cyclobutane tetracalboxylic dianhydride (CBDA) with diamines having m-combination and second diamines having weak acidic group such as OH, COOH. In these systems, transparency of CBDA polyimide films is very important, and photosensitive properties are vary with the fraction of weak acidic groups in polyimides and the content of DNQ in the systems. Therefor, there are the optimum fraction of weak acidic groups and the optimum content of DNQ to obtain high sensitivity and high resolution.
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