Abstract
This paper describes the synthesis and properties of poly(isobenzofuran) (PIBF) films prepared by a thermal chemical vapor deposition (CVD) process. The synthesized precursor monomer, 1,2,3,4-tetrahydro-1,4-epoxynaphthalene, is pyrolyzed by flowing it through a tube furnace at temperatures of 600−750 °C. A reactive intermediate, isobenzofuran (IBF) monomer, is produced by this pyrolysis and deposited onto a silicon substrate where it polymerizes to form a thin coating of poly(isobenzofuran) (PIBF) on the surface. The chemical structure and composition of the PIBF films are supported by nuclear magnetic resonance (NMR) spectroscopy, Fourier transform infrared spectroscopy (FT-IR), and X-ray photoelectron spectroscopy (XPS). The weight-average molecular weight of the PIBF films range from 5500 to 9400 by varying the deposition (stage), pyrolysis (furnace), and vaporization (source) temperatures. With the variation of deposition temperature (5, 10, 15, 20, 25 °C) and pyrolysis temperature (600, 650, 700, 750...
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