Abstract
AbstractPolyimidothioethers were synthesized as possible polymers for evaluation as X‐ray resists. These polymers were varied in the ratio of the monomers and in their structures. Aliphatic thiols, bismaleimides, and iodonium monomers were used. The composition was varied using ratios of the bisimide to iodonium of 9: 1, 8 : 2, 7 : 3, 6 : 4, 5 : 5, and 0 : 1. The ratio of the thiols, containing 6 to 10 CH2 groups, to the monomers was 1 : 1. The synthesis and characterization of the intermediate compounds and polymers are described in detail.
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