Abstract

A layered organic/inorganic hybrid thin film consisting of MoO 3 with poly( N-methylaniline) (PNMA) was prepared as a VOC sensor. The MoO 3 thin films were deposited by chemical vapor deposition. Ion-exchangeable sodium ions were inserted into MoO 3 interlayers by reduction process. The (PNMA) x MoO 3 hybrid thin film is formed by an intercalation process to ion-exchange sodium ions for PNMA into MoO 3 interlayers. The (PNMA) x MoO 3 hybrid grains being oriented highly on substrate surface are observed by X-ray diffraction and field-emission scanning electron microscopic analyses. The sensing sensitivity of (PNMA) x MoO 3 hybrid thin film to acetaldehyde is as high as that to formaldehyde, whereas typical organic/MoO 3 hybrids, polyaniline/MoO 3, show a higher sensitivity to formaldehyde than to acetaldehyde, indicating that organic/MoO 3 hybrids can be controlled by modifying the interlayer organic components.

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