Abstract
Polycrystalline piezoelectric lead-free Bi0.5Na0.5TiO3 (abbreviated as BNT) thin films were deposited on Pt/TiO2/SiO2/Si substrates by an optimized Sol-Gel process. The phase structure and morphology of the as-prepared product were examined by X-ray diffraction (XRD), Raman spectroscopy and scanning electron microscopy (SEM). The film treated at 700°C with the rapid thermal processor (RTP) for 30sec is dense and well crystallized in the rhombohedral perovskite phase. The dielectric constant and loss tangent at 10kHz are 420 and 0.07%, respectively, while the remnant polarization and coercive field are 12μC/cm2 and 120kV/cm, respectively, at 1000Hz.
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