Abstract
A radical-enhanced atomic layer deposition (RE-ALD) process is described for the synthesis of BiFeO3. Metalorganic precursors β-diketonate, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) iron(III) (Fe(TMHD)3), and Bi(TMHD)3 are coreacted with oxygen radicals (produced by a coaxial microwave cavity) as the oxidation source. Stoichiometric BiFeO3 films were deposited on SrTiO3 (001) substrates at 210 °C and crystallized from 450 to 750 °C. The crystallinity and phases in the films were characterized using X-ray diffraction (XRD) and transmission electron microscopy (TEM). The BiFeO3 was determined to be phase-pure and epitaxial when annealed at 650 °C. To study the functional properties, ferroelectric switching was demonstrated using piezoresponse force microscopy (PFM), while weak ferromagnetic behavior was measured using superconducting quantum interference device (SQUID) magnetometry. The films have properties comparable to those of films grown by other methods—growth rates are superior in comparison to ot...
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