Abstract
Benzocyclobutene resins play an important role in microelectronic industry owing to their excellent physical and chemical properties. In our work, three novel benzocyclobutene-terminated imide monomers were synthesized via the reaction of 1-aminomethyl benzocyclobutene with various aromatic dianhydrides. The monomers exhibited good processability with superior solubility and low melting points (<163.5 °C), and they showed similar curing behaviors under N2 with an exothermic peak in differential scanning calorimetry (DSC) curves ranging from 217.3 °C to 287.7 °C. Highly crosslinked resins obtained at 150–300 °C exhibited superior tensile strength (>74.3 MPa), outstanding thermal stability (Td > 466 °C in N2), high glass transition temperature (>278 °C), high storage modulus (>3.25 GPa at 30 °C), low dielectric constant (<3.07 at 1 MHz) and good water resistance (the water absorption was below 0.81% after immersed in water for 24 h and the water contact angle was higher than 86.6°). Atomic force microscopy demonstrated the perfect uniformity and planarity of the cured films.
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