Abstract
"Barium strontium Titanate (BST) is a solid solution consist of BaTiO3 and SrTiO3 that mixed with suitable ratio. Barium strontium Titanate oxide (Ba0.8Sr0.2TiO3) thin films prepared by sol gel technique. Barium strontium Titanate thin films deposited on Si substrate and annealed at [400,500, 600 and 700] ºC. The characterization of BST films investigated by a different technique, the X-Ray Diffraction (XRD) and Scanning Electron Macroscopy (SEM) revealed the phases, crystal structure and surface topography of the films. XRD pattern shows tetragonal phase for Ba0.8Sr0.2TiO3 perovskite structure with many peaks for different plans. The films annealed at the different temperature that indicated intermediate phases on perovskite structure of Ba0.8Sr0.2TiO3.
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