Abstract
In this chapter, the synergistic effect of benzotriazole (BTA) and potassium molybdate (K2MoO4) on the polishing performance of Ru and Cu in KIO4-based slurry is investigated. The galvanic corrosion of Cu in a Cu-Ru coupled system has been studied from a completely different perspective. X-ray photoelectron spectroscopy combined with other measurements was used to reveal the synergistic passivation mechanism of BTA and K2MoO4. The results show that the galvanic corrosion of Cu is strongly mitigated in the presence of both BTA and K2MoO4. Based on the data, it is found that the adsorbed MoO4 2− not only modifies the surface structure of Ru and Cu, but also supports the adsorption of BTA passivation film. Also, it is found that insoluble salts are deposited into the gaps of the passivation film, which improve the compactness of the molybdate-BTA film. The CMP tests show that the selectivity of the material removal rate of Cu to Ru can be evidently improved in the presence of BTA and K2MoO4. The increase of oxidizer content and the reduction of polishing down force could help to further decrease the material removal rate selectivity between Cu and Ru.
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