Abstract
A new discrete event simulation setup and simulator called FabSim is presented. It is a single C++ executable ready for simulating a semiconductor factory of any size. It is based on SystemC and applies synchronous discrete event simulation. Several data files serve as input: a list describing the equipment (including data like batch size, process steps offered, throughput and others), flow charts of all processes (unlimited number of product, rework and test flows) and a list of lots to be started. Outputs are data files describing machine use, buffer occupancy, cycle time of lots processed etc.. Simulation speed is very high. A fab with 500 wafer starts per day will require a simulation time of 6 minutes on a PC for 1 year of operation. The simulation tool presented here is compact and fast, easy to setup and use.
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