Symmetric differential capacitive pressure sensor

Abstract

Differential capacitive sensors are common to pressure gauges. Previous sensors of the bridge type have utilized only two variable (active) components, resulting in a half-bridge electrical equivalent circuit. There are numerous advantages of a symmetric full bridge, using four active components. The symmetry improves linearity and increases signal to noise ratio, especially when supported by electronics based on synchronous detection. Another advantage of symmetry is invariance to scaling, through immunity to stray capacitance. This feature is especially important in relationship to the current trend toward micro-electro-mechanical systems. A crude, inexpensive, macroscopic prototype of the present design was built with attention to high sensitivity. Constructed with a thin aluminized Mylar diaphragm, this device can readily resolve pressure changes smaller than 10−2 Pa.