Switching time of planar ferroelectric capacitors using strontium titanate and barium strontium titanate films

Abstract

A microstripe cavity was used to make microwave (f∼10 GHz) measurements of the time of variation of the permittivity of SrTiO3 and (Ba,Sr)TiO3 films exposed to unipolar video-frequency voltage pulses. It was shown that the permittivity of SrTiO3 films varies over times less than 30 ns. For (Ba,Sr)TiO3 films two characteristic times of variation of the permittivity were identified: a fast variation over times less than 30 ns and a slower variation, on the order of 20 μs.