Abstract
Vanadium dioxide (VO2) has promising applications in smart windows and active micro-optical devices due to its thermochromic properties. However, the successful fabrication and patterning of VO2 thin films with the correct stoichiometry and phase are challenging. In this study, we investigated lithographically patterned and non-patterned VO2 thin films fabricated by reactive ion beam deposition, using variable angle spectroscopic ellipsometry, Raman spectroscopy, and transmission and reflection measurements. The results show that the refractive index and extinction coefficient exhibit significant changes for near-infrared wavelengths when heated above 68 °C, confirming its thermochromic properties. The Raman spectroscopy results indicate the formation of the monoclinic phase VO2(M) after annealing, which was not changed by reactive ion etching. Lithographically structured VO2-layers were successfully realized demonstrating the potential of VO2 as a material for active micro-optical devices, such as guided mode resonance filters with switchable reflectance. The results suggest that VO2 has great potential as a promising material for actively switched optical elements and micro-optical devices.
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