Abstract
ABSTRACT We propose and demonstrate a unique suspended slot-waveguide structure supported by a thin slab to realizehigh-quality air-clad silicon slotted microring resonators (SMRs) on the silicon-on-insulator platform, based on afabrication process consisting of two-step electron beam lithography and inductively-coupled-plasma reactive-ion-etching. Our SMRs can achieve an intrinsic optical quality factor (Q) above 10 5 operating at the telecom band,which is the highest value for silicon SMRs reported to date. The demonstrated high-quality air-clad silicon SMRsenable great potential for broad applications in biosensing, nonlinear photonics, and cavity optomechanics.Keywords: Integrated optics devices, silicon photonics, silicon-on-insulator (SOI), optical waveguides, microres-onators, microstructure fabrication 1. INTRODUCTION Recently, the so-called slot waveguides have attracted great deal of research interest and have found broad appli-cations ranging from optical signal processing,
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