Abstract
This paper presents original designs of micro-fluidic sensors. Targeted applications are pH-meters devices or chemical sensors. The sensing part of the device consists of a Suspended Gate Field Effect Transistor (SGFET). Chemicals to test are brought inside the device by a micro-fluidic channel. The floor of the channel consists on the drain, source and also active area of the transistor, whereas the top of the buried channel corresponding of the gate of the transistor. By this way products that flow in the micro-fluidic channel directly module the concentration charge inside the transistor's gap and thus induce changes in transfer characteristics. This paper describes the fabrication process and presents first electrical tests performed with liquid flow injection in the device showing the interest of the system.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
