Suspended 3D pyrolytic carbon microelectrodes for electrochemistry

Abstract

Carbon microelectrodes have a wide range of applications because of their unique material properties and biocompatibility. This work presents the fabrication and characterization of suspended pyrolytic carbon microstructures serving as three-dimensional (3D) carbon microelectrodes for electrochemical applications. A 3D polymer template in epoxy based photoresist (SU-8) was fabricated with multiple steps of UV photolithography and pyrolysed at 900 °C to obtain 3D carbon microelectrodes. The pyrolytic carbon microstructures were characterized by SEM, Raman spectroscopy and XPS to determine the mechanical stability, shrinkage and material properties. The smallest feature size fabricated in the suspended carbon layer was 2 μm. A three electrode microelectrode chip with 3D pyrolytic carbon microstructures as the working electrode was designed and fabricated. The electrodes were characterized with cyclic voltammetry (CV) and impedance spectroscopy (EIS) using potassium ferri-ferrocyanide redox probe in a custom made batch system with magnetic clamping. Different 3D pyrolytic carbon microelectrodes were compared and the optimal design displayed twice the peak current and half the charge transfer resistance as compared to 2D carbon electrodes. The higher sensitivity of 3D carbon microelectrodes for electrochemical sensing was illustrated by dopamine detection.