Suspended 1D Metal Oxide Nanowire Junction Networks for Use As Highly Sensitive Gas Sensors

Abstract

Introduction Over the last few decades, research has been conducted to build sensitive, reliable and high-performance gas monitoring systems that meet the demands of industrial sites. In particular, 1D metal oxide (MOx) nanomaterials have been actively studied as a gas sensing material because of its excellent sensing performance, low cost, and suitability for a micro/nano device [1]. Besides, the MOx 1D nanostructures are relatively easy to synthesize, easy to control morphology and have various options including surface functionalization to make even further enhancement of the sensing performance [2]. In particular, when the MOx 1D nanostructures linked together and form a junction structure, an additional current path is generated through the formed junction and this forms additional potential barriers. Thus, an additional gas sensing mechanism can be utilized to further improve sensing performance as shown in Figure 1 [3]. In general, however, the fabrication process of MOx nanostructure networks including dense junctions requires complex and precise techniques. In addition, the nanostructure networks are positioned on the substrates. Therefore, gas access to the junctions and mass transfer to the sensing sites are limited. In this study, we report a novel gas sensor architecture including a suspended carbon mesh integrated with ZnO nanowires networks. The nanowires are grown on single carbon wires of the mesh and meet at the void regions of mesh structures. Thus, dese nanowire junctions can be formed in a suspended form (Figure 2). Owing to the suspended architecture, gas access to the sensing sites is effective and the sensing signal is free from the effect of the substrate [4]. The suspended carbon nanomesh was fabricated using the carbon-MEMS process consisting of simple photolithography and pyrolysis processes. The ZnO nanowire networks were precisely patterned at the suspended mesh using the hydrothermal method. The length of the nanowires was adjusted for good junction formation and the advantage of the suspended junctions was evaluated. Method Suspended carbon nanomesh was fabricated by photolithography and pyrolysis (Vacuum, 700°C) processes. Via two successive exposure steps in photolithography, suspended polymer mesh was defined without complex lithography techniques. After the pyrolysis process, microscale polymer mesh was converted into nano-sized carbon mesh because of the large volume reduction (up to 90%) in pyrolysis. After a thin ZnO seed layer was selectively coated on the suspended carbon mesh, ZnO nanowires were grown on the patterend seed layer by a hydrothermal process (Zn(NO3)2 25mM, HMTA 25mM ). The pristine ZnO nanostructures were annealed using RTA (N2 atmosphere, 300°C) for better adhesion and connection. Results and Conclusions Figure 2 shows the SEM images of the fabricated suspended carbon nanomesh (width ~140μm, thickness ~400nm, line spacing ~6μm) and ZnO nanowire networks (diameter ~100 nm, length ~3.5 μm). ZnO nanowires were well grown to form uniform and dense junctions. To characterize the effect of the nanowire junctions, NO2 gas sensing responses were compared between a nanomesh-based gas sensor and a single suspended carbon wire-based sensor. As shown in Figure 3. the suspend mesh-based sensor exhibited higher response and wider linear range due to the effect of junctions. This novel sensor architecture can be widely utilized because all the fabrication processes of the presented sensor were carried out at a wafer-level making it cost-effective and various MOx nanowires can be simple integrated with a bunch of junctions.