Abstract
Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.
Highlights
With the advance and development of science and technology, research of the microscale has became a hot trend in recent decades
Structural parameter design is an important part of designing a compliant micro-/nano-positioning stage, because it governs the performance of the stage dominantly, e.g., stiffness, strength, deflection shape or decoupling performance
In the field of mechanical design, finite element analysis (FEA) and mathematical modeling are two major methods to evaluate the performance before the prototype fabrication
Summary
With the advance and development of science and technology, research of the microscale has became a hot trend in recent decades. Since the interaction with the microscale object is a major step in research, micromanipulation technology becomes an essential tool. It has been widely used in various fields including micro-electromechanical systems (MEMS), micro-assembly, biology, etc. Specific operations of micromanipulation include positioning, griping, puncturing, injecting, etc. Micro-/nano-positioning is considered as the most basic one [6], because most of the other operations are the extended application of positioning. Gripping is implemented by the relative positioning of two gripper tips; puncturing is the positioning of the needle, etc. The precision of the used positioning method directly affects the accuracy of the corresponding operation, especially at a small scale at the micro-/nano-meter level. Precision positioning plays a key role in the micromanipulation domain
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