Survey and comparative analysis of different techniques for electron density measurements in low temperature plasma

Abstract

This paper is devoted towards the study and comparison of different techniques for measurement of electron density in low temperature plasma. To study the plasma profile it is necessary that one should know about its parameter. Electron density is one of the important plasma parameters of plasma profile. Other plasma parameters like plasma frequency, Debye length and dielectric parameter are also depended on the density of electron. For the plasma density measurement, there are various techniques and each technique has its own unique advantages and some disadvantages as well. Basic techniques for plasma density measurement are Langmuir and Resonance probe based measurement techniques, microwave interferometer and optical emission spectroscopy. This paper also covers basics about plasma parameters. In the first section plasma parameters and their importance is described in brief. Then, principle, analysis and experimental setup for all basic four techniques are included in next section. The last section is devoted towards the comparison of these unique techniques.