Abstract
An angle-resolved electron-beam-excitation Auger-electron-spectroscopy, called as “surface wave excitation Auger electron spectroscopy (SWEAES),” was developed to characterize the semiconductor surface on an atomic scale. SWEAES enables us to get information about (1) surface valence electron states, (2) surface inner potentials concerned with high energy electron diffraction at the surface wave resonance (SWR) condition, (3) surface composition of ultra-thin heterostructures, and (4) confinement effects of diffracted surface electron waves at the SWR condition. These effects were demonstrated for In1-xGaxAs/GaAs(001)-c(8 × 2)-In/Ga and (GaAs)2/(InAs)1/GaAs(001) strained single quantum well surfaces.
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