Abstract
Surface voltage and surface photovoltage measurements have becomeimportant semiconductor characterization tools, largely because of theavailability of commercial equipment and the contactless nature of themeasurements. The range of the basic technique has been expanded through theaddition of corona charge. The combination of surface charge and illuminationallows surface voltage, surface barrier height, flatband voltage, oxidethickness, oxide charge density, interface trap density, mobile chargedensity, oxide integrity, minority carrier diffusion length, generationlifetime, recombination lifetime and doping density to be determined. In thisreview I shall briefly review the history of surface voltage, then discuss theprinciples of the technique and give some examples and applications.
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