Abstract
The captions for figures 9 and 10 of this article were transposed, the correct versions follow. Figure 9. SEM photograph of a vertical accelerometer; planar view (top) and a close up of the membrane structure (bottom). Reproduced with kind permission from Sarah Audet, Motorola. Figure 10. Lateral accelerometer in (a) planar view and (b) a photograph of a surface micromachined accelerometer fabricated by Analog Devices. Reproduced with kind permission, Kevin Chau, Analog Devices.
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