Abstract
Summary form only given. A novel atmospheric pressure plasma tunnel (APPT) has been developed for surface treatment of flat panel display (FPD) glass substrates at atmospheric pressure with gas mixtures containing argon and oxygen. The electrical properties of the plasma tunnel were presented by simultaneous measurement of current and voltage to further character the plasma. The effect of the plasma treatment on the surfaces of FPD glass substrates has also been studied by using contact angle measurement and scanning probe microscopy (SPM). The results show that the wettability of the surface has an obvious improvement after the plasma treatment.
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