Abstract
Abstract A copper constantan thin film thermocouple has been used to measure the surface temperature of a target during ion bombardment. Argon beams of 50–100 keV energy and 0–300 mwatt power have been used as heat source on a target in contact with a massive copper holder maintained at 80 or at 300K. The thermal contact has been changed from that ensured by the mechanical pressure of a metal spring to that obtained by gluing the target to the holder with a silver base paste. The surface temperature reaches a steady state value after about 150 s of bombardment and its maximum value depends on the beam power and on the quality of the thermal contact with the holder. Beam induced surface temperature increase as lar ge as 270°C are measured in the case of a bad thermal contact and for a beam power of 300 mwatt.
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