Abstract

A ZnO crystal of wurtzite-type structure has polar surfaces of (0001) and (0001), which are terminated by Zn and O ions, respectively. Observation conducted by atomic force microscopy showed that step/terrace structures were formed on the (0001) and (0001) surfaces, whose step height was predominantly half of lattice parameter, c0. The ionic arrangement of the surfaces was determined by coaxial impact-collision ion scattering spectroscopy (CAICISS); the CAICISS spectra had a periodicity of 60° for azimuth angle dependence. From the analyses of CAICISS spectra it was shown that the (0001) and (0001) surfaces had a single dangling bond, and no ionic distortion occurred.

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