Abstract
The surface structure of 2 MeV O +-ion-implanted silica glass has been investigated by the X-ray diffraction method and the spectroscopic method. It is found that the refractive index and density of the surface layer increases and decreases by 1% and 2.5% with the O +-ion implantation, respectively. It is inferred that silicon ions are coordinated by four oxygen ions in the surface damaged layer of the glass. The SiOSi bond angle decreases and the middle range ordering reduces with O +-ion implantation. It is deduced that the surface structure of the ion-implanted silica glass is similar to that of neutron irradiated silica glass.
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