Abstract

The surface contact angles of poly(fluoroalkyl acrylate)s and poly(fluoroalkyl methacrylate)s vary with the cooling mode used after heat treatments. Grazing angle X-ray reflectivity measurement was applied to characterize the surface roughness of polyacrylate thin films on silicon wafers. Surface and interface roughnesses of polyacrylate thin films with large contact angles were measured as 0.7–1.2 nm, which are smaller than roughnesses (1.2–1.8 nm) with small contact angles. It was found that the ordering of side chains in polyacrylate thin films causes the surface to change the contact angles.

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